Vacuum microdevices
Bulletin of the Polish Academy of Sciences Technical Sciences
2012
60
No 1
Grzebyk, T.
; Górecka-Drzazga, A.
Nauki Techniczne
19-23
2012
DOI: 10.2478/v10175-012-0004-y
; ISSN 2300-1917
Bulletin of the Polish Academy of Sciences: Technical Sciences; 2012; 60; No 1; 19-23
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