TY - JOUR N2 - Mordenite-zeolite supported Ca-Cu and Ba-Cu catalysts (Ca-Cu/MOR and Ba-Cu MOR) were successfully fabricated for direct decomposition of both NF3 and N2O gases contained in waste gas stream of (semiconductor) electronics industry. N2O conversion rates of Ca-Cu and Ba-Cu catalysts were 79 and 86%, respectively, at 700°C and 1 atm under space velocity of 5000 h–1. The Ca-Cu catalyst was especially noteworthy in that its capability of converting N2O could be maintained even after its exposure to co-feeding NF3 gas constituent in the waste gas stream. Compositional and surface morphological analyses of the Ca-Cu and Ba-Cu catalysts were made before and after exposure to the waste gas stream to examine any noticeable degradation or change of the catalysts. Unlike Ba-Cu catalyst, SiO2 constituent of the Ca-Cu catalyst was found to remain immune to the NF3-cofeeding waste gas stream, casting a positive prospect for superior and steady N2O decomposition performance via maintenance of its structural integrity. L1 - http://www.czasopisma.pan.pl/Content/111340/PDF/AMM-2019-2-43-Sungkyu.pdf L2 - http://www.czasopisma.pan.pl/Content/111340 PY - 2019 IS - No 2 EP - 700 DO - 10.24425/amm.2019.127600 KW - nitrous oxide (N2O) KW - nitrofluorine three (NF3) KW - perfluorocompounds (PFCs) KW - direct decomposition KW - catalyst A1 - Seo, Minhye A1 - Lee, Soo-Young A1 - Cho, Sung-Su A1 - Song, Hyoung Woon A1 - Kim, Hyun-Kyung A1 - Kim, Dong Soo A1 - Lee, Sungkyu PB - Institute of Metallurgy and Materials Science of Polish Academy of Sciences PB - Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences VL - vol. 64 DA - 2019.06.27 T1 - Effect of NF3 Gas on Stabilization of Alkaline Earth Metal-CU Mordenite Catalysts During N2O Decomposition Reaction SP - 695 UR - http://www.czasopisma.pan.pl/dlibra/publication/edition/111340 T2 - Archives of Metallurgy and Materials ER -