TY - JOUR N2 - Polymer-based capacitive humidity sensors emerged around 40 years ago; nevertheless, they currently constitute large part of sensors’ market within a range of medium (climatic and industrial) humidity 20−80%RH due to their linearity, stability and cost-effectiveness. However, for low humidity values (0−20%RH) that type of sensor exhibits increasingly nonlinear characteristics with decreasing of humidity values. This paper presents the results of some experimental trials of CMOS polymer-based capacitive humidity sensors, as well as of modelling the behaviour of that type of sensor. A logarithmic functional relationship between the relative humidity and the change of sensor output value at low humidity is suggested. L1 - http://www.czasopisma.pan.pl/Content/106327/PDF/10.1515-mms-2017-0048-paper%2003.pdf L2 - http://www.czasopisma.pan.pl/Content/106327 PY - 2017 IS - No 4 EP - 607–616 DO - 10.1515/mms-2017-0048 KW - polymer-based capacitive humidity sensors KW - low humidity measurement KW - humidity sensors modelling A1 - Majewski, Jacek PB - Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation VL - vol. 24 DA - 2017.12.15 T1 - Low Humidity Characteristics of Polymer-Based Capacitive Humidity Sensors SP - 607–616 UR - http://www.czasopisma.pan.pl/dlibra/publication/edition/106327 T2 - Metrology and Measurement Systems ER -