TY - JOUR L1 - http://www.czasopisma.pan.pl/Content/103610/PDF/133-138_00612_Bpasts_66No2_30.04.18_K.pdf L2 - http://www.czasopisma.pan.pl/Content/103610 PY - 2018 IS - No 2 (Special Section on Nano- and Micromechanics) EP - 137 KW - MEMS KW - miniature TEM KW - electron emission KW - focusing of electron beam KW - electron optics column A1 - Krysztof, M. A1 - Grzebyk, T. A1 - Górecka-Drzazga, A. A1 - Adamski, K. A1 - Dziuban, J. VL - 66 DA - 2018.04.30 T1 - Electron optics column for a new MEMS-type transmission electron microscope SP - 133 UR - http://www.czasopisma.pan.pl/dlibra/publication/edition/103610 T2 - Bulletin of the Polish Academy of Sciences Technical Sciences ER -