@ARTICLE{Granata_M._Internal_2015, author={Granata, M. and Balzarini, L. and Degallaix, J. and Dolique, V. and Flaminio, R. and Forest, D. and Hofman, D. and Michel, C. and Pedurand, R. and Pinard, L. and Sassolas, B. and Straniero, N. and Teillon, J. and Cagnoli, G.}, number={No 1 March}, journal={Archives of Metallurgy and Materials}, howpublished={online}, year={2015}, publisher={Institute of Metallurgy and Materials Science of Polish Academy of Sciences}, publisher={Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences}, title={Internal Friction and Young's Modulus Measurements on SiO2 and Ta2O5 Films Done with an Ultra-High Q Silicon-Wafer Suspension}, URL={http://www.czasopisma.pan.pl/Content/89543/PDF/10172%20Volume%2060%20Issue%201-59%20paper.pdf.pdf}, doi={10.1515/amm-2015-0060}, }