@ARTICLE{Lee_Kwangmin_Microstructure_2020, author={Lee, Kwangmin and Kang, Seokil}, volume={vol. 65}, number={No 4}, journal={Archives of Metallurgy and Materials}, pages={1357-1360}, howpublished={online}, year={2020}, publisher={Institute of Metallurgy and Materials Science of Polish Academy of Sciences}, publisher={Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences}, abstract={The low adherence of diamond-like carbon (DLC) films on titanium (Ti) alloys can be improved by using interlayer coatings. In this study, DLC (a-C:H) films were deposited using radio-frequency plasma-enhanced chemical vapor deposition (rf-PECVD), and a TiCN interlayer was applied between the extra low interstitial (ELI) grade of Ti-6Al-4V alloy and a-C:H film. The characteristics of the a-C:H-coated Ti-6Al-4V ELI alloy were investigated using field emission scanning electron microscopy, Vickers hardness, and scratch and wear tests. The DLC (a-C:H) films deposited by rf-PECVD had a thickness of 1.7 µm, and the TiCN interlayer had a thickness of 1.1 µm. Vickers hardness of the DLC (a-C:H) films were increased as a result of the influence of the TiCN interlayer. The resulting friction coefficient of the a-C:H-coated Ti-6Al-4V with the TiCN interlayer had an extremely low value of 0.07.}, type={Article}, title={Microstructure and Mechanical Properties of Amorphous Hydrogenated DLC-Coated Ti-6Al-4V ELI Alloy with TiCN Interlayer Prepared by rf-PECVD}, URL={http://www.czasopisma.pan.pl/Content/116824/PDF/AMM-2020-4-23-Kwangmin%20ee.pdf}, doi={10.24425/amm.2020.133699}, keywords={DLC coating, rf-PECVD, Ti-6Al-4V ELI Alloy, TiCN}, }