@ARTICLE{Majewski_Jacek_Low_2017, author={Majewski, Jacek}, volume={vol. 24}, number={No 4}, journal={Metrology and Measurement Systems}, pages={607–616}, howpublished={online}, year={2017}, publisher={Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation}, abstract={Polymer-based capacitive humidity sensors emerged around 40 years ago; nevertheless, they currently constitute large part of sensors’ market within a range of medium (climatic and industrial) humidity 20−80%RH due to their linearity, stability and cost-effectiveness. However, for low humidity values (0−20%RH) that type of sensor exhibits increasingly nonlinear characteristics with decreasing of humidity values. This paper presents the results of some experimental trials of CMOS polymer-based capacitive humidity sensors, as well as of modelling the behaviour of that type of sensor. A logarithmic functional relationship between the relative humidity and the change of sensor output value at low humidity is suggested.}, type={Artykuły / Articles}, title={Low Humidity Characteristics of Polymer-Based Capacitive Humidity Sensors}, URL={http://www.czasopisma.pan.pl/Content/106327/PDF/10.1515-mms-2017-0048-paper%2003.pdf}, doi={10.1515/mms-2017-0048}, keywords={polymer-based capacitive humidity sensors, low humidity measurement, humidity sensors modelling}, }