Bragg scattering of waves propagating in a periodically disturbed substrate is widely applied in optics and micro-acoustic systems. Here, it is studied for Rayleigh waves propagating on a periodically grooved elastic substrate. Practically applied groove depth in the Bragg grating reflectors does not exceed a few percent of the Rayleigh wavelength. Here, the analysis is carried out for periodic grooves of larger depth by applying the elastic plate model for the groove walls. The computed results show that the surface wave existence and reflection depends strongly on both the groove depth and period, and that there are limited domains of both for practical applications, primarily in comb transducers of surface waves.