Results of scientific researches show the trend of active using nitrides and borides of transition
metals and their combination in developing protective materials. While single elements
nitrides have been well studied, their multilayer modifications and combinations require
more detailed study. Physical-mechanical properties and structural-phase state of multilayer
coating according to the deposition conditions is an important task for the study.
It will be the analysis of physical-mechanical and electrical properties of coatings based on
refractory metals nitrides, their structure and phase composition and surface morphology
depending on the parameters of condensation. It was established the structure and behavior
of nano scale coatings based on refractory metals nitrides (Ti, Zr) depending on the size
of nano grains, texture, stress occurring in coatings.