Title

Sealing of silicon-glass microcavities with polymer filling

Journal title

Bulletin of the Polish Academy of Sciences Technical Sciences

Yearbook

2016

Volume

64

Issue

No 2

Authors

Knapkiewicz, P. ; Augustyniak, I.

Divisions of PAS

Nauki Techniczne

Coverage

283-286

Date

2016

Identifier

DOI: 10.1515/bpasts-2016-0032 ; ISSN 2300-1917

Source

Bulletin of the Polish Academy of Sciences: Technical Sciences; 2016; 64; No 2; 283-286