Details Details PDF BIBTEX RIS Title Analysis Of Factors Affecting Gravity-Induced Deflection For Large And Thin Wafers In Flatness Measurement Using Three-Point-Support Method Journal title Metrology and Measurement Systems Yearbook 2015 Volume vol. 22 Issue No 4 Authors Liu, Haijun ; Dong, Zhigang ; Kang, Renke ; Zhou, Ping ; Gao, Shang Keywords flatness measurement ; large and thin silicon wafer ; GID ; three-point-support method ; initial stress Divisions of PAS Nauki Techniczne Coverage 531-546 Publisher Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation Date 2015[2015.01.01 AD - 2015.12.31 AD] Type Artykuły / Articles Identifier ISSN 2080-9050, e-ISSN 2300-1941 Source Metrology and Measurement Systems; 2015; vol. 22; No 4; 531-546 <div class="test"></div>