Title

Measurement, Modeling and Evaluation of Surface Parameter Using Capacitive-Sensor-Based Measurement System

Journal title

Metrology and Measurement Systems

Yearbook

2011

Issue

No 3

Authors

Murugarajan, A. ; Samuel, G.

Keywords

capacitive sensor ; surface roughness ; machined surfaces

Divisions of PAS

Nauki Techniczne

Coverage

403-418

Publisher

Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation

Date

2011

Type

Artykuły / Articles

Identifier

DOI: 10.2478/v10178-011-0007-9 ; ISSN 2080-9050, e-ISSN 2300-1941

Source

Metrology and Measurement Systems; 2011; No 3; 403-418

References

Jiang X. (2007), Paradigm shifts in surface metrology. Part I. Historical Philosophy, Proceedings of Royal Society A, 463, 2049, doi.org/10.1098/rspa.2007.1874 ; Goh K. (1986), The applicability of a laser triangulation probe to non-contacting inspection, International Journal of Production Research, 24, 6, 1331, doi.org/10.1080/00207548608919807 ; Uchida S. (1979), Two dimensional measurement of surface roughness by the light sectioning method, Annals CIRP, 28, 1, 419. ; Bjuggren M. (1997), Noncontact surface roughness measurement of engineering surfaces by total integrated infrared scattering, Precision Engineering, 20, 1, 33, doi.org/10.1016/S0141-6359(97)00001-9 ; Toh S. (1998), Surface-roughness study using laser speckle method, Optics and Lasers in Engineering, 29, 2-3, 217, doi.org/10.1016/S0143-8166(97)00087-0 ; Cahill B. (2001), LED-based fibre-optic sensor for measurement of surface roughness, Journal of Materials Processing Technology, 119, 1-3, 299, doi.org/10.1016/S0924-0136(01)00954-2 ; Kohno T. (1988), High precision optical surface sensor, Applied Optics, 27, 1, 103, doi.org/10.1364/AO.27.000103 ; Bradley C. (1998), A fiber optic sensor for surface roughness measurement, Journal of Manufacturing Science and Engineering, 120, 2, 359, doi.org/10.1115/1.2830135 ; Luk F. (1989), Measurement of surface roughness by a machine vision system, Journal of Physics E: Scientific Instruments, 22, 12, 977, doi.org/10.1088/0022-3735/22/12/001 ; Al-Kindi G. (1992), An application of machine vision in the automated inspection of engineering surfaces, International Journal of Production Research, 30, 2, 241, doi.org/10.1080/00207549208942892 ; Kiran M. (1998), Evaluation of surface roughness by vision system, International Journal of Machine Tools and Manufacture, 38, 5-6, 685, doi.org/10.1016/S0890-6955(97)00118-1 ; Dhanasekar B. (2006), Evaluation of surface roughness using a image processing and machine vision system, Journal of Metrology Society of India, 21, 1, 9. ; Zawada-Tomkiewicz A. (2010), Estimation of surface roughness parameter based on machined surface image, Metrology and Measurement Systems, 17, 3, 493, doi.org/10.2478/v10178-010-0041-5 ; Adamczak S. (2010), Investigating advantages and disadvantages of the analysis of a geometrical surface structure with the use of Fourier and wavelet transform, Metrology and Measurement Systems, 17, 2, 233, doi.org/10.2478/v10178-010-0020-x ; Shin Y. (1995), Surface roughness measurement by ultrasonic sensing for in-process monitoring, Transactions ASME: Journal of Engineering for Industry, 117, 3, 439, doi.org/10.1115/1.2804352 ; Sherwood K. (1967-68), Surface finish assessment by electrical technique, Proceedings of Institution of Mechanical Engineers E (London), 182, 3k, 344. ; Brecker H. (1977), A capacitance based surface texture measuring system, Annals of the CIRP, 25, 1, 375. ; Shunmugam M. (1980), Inductive and capacitive measurements of surface finish, null, 439. ; Lieberman A. (1988), Capacitance versus stylus measurement of surface roughness, Surface Topography, 1, 315. ; Garbini J. (1992), Surface profile measurement during turning using fringe-field capacitive profilometry, Transactions of the ASME: Journal of Dynamic system, Measurement and Control, 114, 2, 234, doi.org/10.1115/1.2896520 ; Nowicki B. (1998), The in-process surface roughness measurement using fringe field capacitive (FFC) method, International Journal of Machine Tools and Manufacturing, 38, 5-6, 725, doi.org/10.1016/S0890-6955(97)00124-7 ; Williams R. (1990), Experimental comparison of a stylus based and a capacitance based surface roughness measurement system for different micro surface contour, Society of Manufacturing Engineers, IQ990-255, 1. ; Varghese S. (1994), A multi sensor approach to in-process monitoring of surface roughness, International Journal of Material Processing Technology, 44, 3-4, 353, doi.org/10.1016/0924-0136(94)90449-9 ; Kiyono S. (1994), Profile measurement of machined surface with a new differential method, Precision Engineering, 16, 3, 212, doi.org/10.1016/0141-6359(94)90127-9 ; Guadarrama-Santana A. (2003), A new approach for measuring surface parameters by a capacitive sensor, Sensors: Proceedings of IEEE, 1, 553. ; Bruce N. (2005), Capacitance measurement of Gaussian random rough surfaces with planar and corrugated electrodes, Measurement Science and Technology, 16, 3, 669, doi.org/10.1088/0957-0233/16/3/007 ; Chang H.-K. (2007), In-process surface roughness prediction using displacement signals from spindle motion, International Journal of Machine Tools and Manufacture, 47, 6, 1021, doi.org/10.1016/j.ijmachtools.2006.07.004 ; Lion precision, Technote (2009). Capacitive sensor operation and optimization, LT-03-0020.