TY - JOUR N2 - In this work the design aspects of a piezoelectric-based resonance ceramic pressure sensor made using low-temperature co-fired ceramic (LTCC) technology and designed for high-temperature applications is presented. The basic pressure-sensor structure consists of a circular, edge-clamped, deformable diaphragm that is bonded to a ring, which is part of the rigid ceramic structure. The resonance pressure sensor has an additional element – a piezoelectric actuator – for stimulating oscillation of the diaphragm in the resonance-frequency mode. The natural resonance frequency is dependent on the diaphragm construction (i.e., its materials and geometry) and on the actuator. This resonance frequency then changes due to the static deflection of the diaphragm caused by the applied pressure. The frequency shift is used as the output signal of the piezoelectric resonance pressure sensor and makes it possible to measure the static pressure. The characteristics of the pressure sensor also depend on the temperature, i.e., the temperature affects both the ceramic structure (its material and geometry) and the properties of the actuator. This work is focused on the ceramic structure, while the actuator will be investigated later. L1 - http://www.czasopisma.pan.pl/Content/90343/PDF/Journal10178-Volume%20XXII%20Issue3_01paper.pdf L2 - http://www.czasopisma.pan.pl/Content/90343 PY - 2015 IS - No 3 EP - 340 DO - 10.1515/mms-2015-0034 KW - LTCC KW - piezoelectric KW - pressure sensor A1 - Belavič, Darko A1 - Bradeško, Andraž A1 - Zarnik, Marina Santo A1 - Rojac, Tadej PB - Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation VL - vol. 22 DA - 2015[2015.01.01 AD - 2015.12.31 AD] T1 - Construction Of A Piezoelectric-Based Resonance Ceramic Pressure Sensor Designed For High-Temperature Applications SP - 331 UR - http://www.czasopisma.pan.pl/dlibra/publication/edition/90343 T2 - Metrology and Measurement Systems ER -