TY - JOUR L1 - http://www.czasopisma.pan.pl/Content/84497/PDF/10.1515bpasts-2016-0032.pdf L2 - http://www.czasopisma.pan.pl/Content/84497 PY - 2016 IS - No 2 EP - 286 DO - 10.1515/bpasts-2016-0032 A1 - Knapkiewicz, P. A1 - Augustyniak, I. VL - 64 DA - 2016 T1 - Sealing of silicon-glass microcavities with polymer filling SP - 283 UR - http://www.czasopisma.pan.pl/dlibra/publication/edition/84497 T2 - Bulletin of the Polish Academy of Sciences Technical Sciences ER -