TY - JOUR N2 - We present a prototype of a simple, low-cost setup for a fast scatterometric surface texture measurements. We used a total integrated scatter method (TIS) with a semiconductor laser (λ =  638 nm) and a Si photodiode. Using our setup, we estimated the roughness parameters Rq for two reference surfaces (Al mirrors with flatness λ/10) and seven equal steel plates to compare. The setup is easily adaptable for a fast, preliminary manufacturing quality control. We show is possible to construct a low-cost measurement system with nanometric precision. L1 - http://www.czasopisma.pan.pl/Content/116520/PDF/10_485-490_01475_Bpast.No.68-3_30.06.20_K3A_TeX.pdf L2 - http://www.czasopisma.pan.pl/Content/116520 PY - 2020 IS - 48 EP - 490 DO - 10.24425/bpasts.2020.133364 KW - scatterometry KW - surface texture KW - optical measurement systems KW - surface metrology KW - surface roughness A1 - Kucharski, D. A1 - Zdunek, H. VL - 68 DA - 30.06.2020 T1 - A low-cost, simple optical setup for a fast scatterometry surface roughness measurements with nanometric precision SP - 485 UR - http://www.czasopisma.pan.pl/dlibra/publication/edition/116520 T2 - Bulletin of the Polish Academy of Sciences Technical Sciences ER -