@ARTICLE{Barna_A._Active_2015,
 author={Barna, A. and Földes, I. B. and Bohus, J. and Szatmári, S.},
 volume={vol. 22},
 number={No 1},
 journal={Metrology and Measurement Systems},
 pages={165-172},
 howpublished={online},
 year={2015},
 publisher={Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation},
 abstract={An active beam-pointing stabilization system has been developed for a high-power KrF laser system to eliminate the long-term drift of the directional change of the beam in order to have a stable focusing to a high intensity. The control of the beam direction was achieved by a motor-driven mirror activated by an electric signal obtained by monitoring the position of the focus of the output beam. Instead of large sized UV-sensitive position sensitive detectors a simple arrangement with scatter plates and photodiodes are used to measure the directionality of the beam. After the beam stabilization the long-term residual deviation of the laser shots is ~14 μrad, which is comparable to the shot-to-shot variation of the beam (~12 μrad). This deviation is small enough to keep the focal spot size in a micrometer range when tightly focusing the beam using off-axis parabolic mirrors.},
 type={Artykuły / Articles},
 title={Active Stabilization of the Beam Pointing of a High- Power KrF Laser System},
 URL={http://www.czasopisma.pan.pl/Content/90313/PDF/Journal10178-VolumeXXII%20Issue1_15.pdf},
 doi={10.1515/mms-2015-0014},
 keywords={diffraction-limited UV pulse, beam-pointing stabilization, long-term drift, photodiode},
}