@ARTICLE{Knapkiewicz_P._Sealing_2016, author={Knapkiewicz, P. and Augustyniak, I.}, volume={64}, number={No 2}, journal={Bulletin of the Polish Academy of Sciences Technical Sciences}, pages={283-286}, howpublished={online}, year={2016}, title={Sealing of silicon-glass microcavities with polymer filling}, URL={http://www.czasopisma.pan.pl/Content/84497/PDF/10.1515bpasts-2016-0032.pdf}, doi={10.1515/bpasts-2016-0032}, }