@ARTICLE{Badura_Mikołaj_MOVPE_2020, author={Badura, Mikołaj}, volume={vol. 66}, number={No 2}, journal={International Journal of Electronics and Telecommunications}, pages={389-394}, howpublished={online}, year={2020}, publisher={Polish Academy of Sciences Committee of Electronics and Telecommunications}, abstract={Quantum cascade laser is one of the most sophisticated semiconductor devices. Its technology requires extremely high precision and layers quality. Device performance is limited by thermal extraction form laser core. One of solutions is to apply highly resistivity epitaxial material acting as insulating layer on top of the QCL. Present work describes consequent steps of elaboration of MOVPE technology of Fe-compensated InP layers for further applications in quantum cascade lasers.}, type={Article}, title={MOVPE Technology of Fe-Compensated In PLayers for the Quantum Cascade Laser Applications}, URL={http://www.czasopisma.pan.pl/Content/115217/PDF/53_2020.pdf}, doi={10.24425/ijet.2020.131890}, keywords={MOVPE technology, optoelectronics, quantum cascade lasers, epitaxy}, }